Product Description
High Vacuum Oven features directly heated shelves that can be programmed to heat up to 300oC. The high vacuum chamber can easily pump down to 10-6 Torr, pumped by a turbo pump which is backed by a dry scroll pump (with no oil back-streaming to worry about). While it is very fast to heat up, the cooldown process can be slow (several hours). To preserve the interior surfaces from excessive oxidation, the chamber can only be vented once the shelves have dropped below 100oC. The chamber is vented with nitrogen. A partial vent is possible if you need to allow your sample to cool completely down to ambient temperature while in a nitrogen atmosphere. There are two approximately 11" x 11" (280 mm x 280 mm) shelves, and two custom made aluminum trays. It can bake eight 4" wafers at a time. There are no windows, so light sensitive parts can be baked as long as they are wrapped in foil on the way into the chamber.
Application
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- Baking oxygen or water vapor sensitive polymer coatings in vacuum
- Baking out metal films without oxidizing the surface
- Low temperature metal contact annealing in high vacuum
- Drying out moisture from materials
- Driving off adsorbed water vapor from wafer surfaces
- Fully cross-linking polyimide under vacuum
- Baking assemblies which will go into other vacuum stations
- Flip chip solder reflowing
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Customization
GMS can provide varying levels of uniformity, size, temperature range; if you have a specific tolerance or specification which must be met, please contact us with your requirements so we can ensure the equipment is designed, tested, and adjusted to meet those requirements.
Options
Shelves
Temperature recorders (paper or paperless)
Ethernet communications
Main Product
Company Profile
GMS Technology specialized on manufacturing and sales of industrial ovens, and drying cabinets for LED optoelectronics, SMT/SMD, precision electronics, semiconductors, integrated circuit, 3D materials, automotive, new energy, aerospace industries, universities and research institutions.
Our equipment covering high temperature (+30 to 600ºC), vacuum (1to 1*10torr), and high pressure (8MPa) applications, and clean room baking equipment. And our engineer team are able provide customized solutions based on application requirements, and also new technology such as bar code scanning, automatic door opening, communication with MES, EAP systems to build a moder automatic production workshop.
Our main products include:
.Precise ovens .Truck-in ovens
.High temperature ovens .Anaerobic (inert gas) ovens
.Clean room ovens .Nitrogen ovens
.Vacuum ovens .Pressure ovens
.Wafer annealing ovens .Conveyor ovens
.Automatic ovens .Dyring cabinets
Our Advantages
Application Scenarios
Our Certificate
Packaging & Shipping
1.Basic Protective Packaging
Inner Packaging
·Cushioning Materials:EPE foam, plastic foam and inner corrugated cardboard, with protective film for complete equipment wrapping
·Waterproof Sealing:Waterproof bag covering the equipment
Outer Packaging
·Wooden Frame: IPPC-certified fumigated wooden crate
·Edge Protection: Metal corner guards + nylon strapping (forklift impact prevention)
·Base Pallet: Steel/plastic pallet (10cm ground clearance for moisture protection)
2. Warning Labels
International standard symbols (tilt/moisture protection/stacking limits)
Audited Supplier 
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